Z-axis module in the semiconductor industry
rapid response
The setting time of the motor (within 20 Units, with a magnetic scale resolution of 1μm) under the condition of high-frequency (above 30Hz) movement with a stroke of 2mm and 5mm.
High acceleration
It has a light load, and the acceleration can reach 20G.
integratedness
It has a small volume and a compact structure. There is a spring structure inside, and it can be installed vertically.
| Technical indicators | specification |
| stroke(mm) | 35mm |
| load(kg) | / |
| repeatability accuracy(um ) | ±1 |
| acceleration(G) | 20G |
| adjusting time(ms) | 20 |
Z-axis module in the semiconductor industry for IC die bonding and packaging assembly
Superb rigidity
It uses carbon fiber as the framework. The advantage of carbon fiber is that it is lightweight and has strong rigidity. Its rigidity is 10 times that of aluminum.
Temperature rise control
It adopts the air - cooling heat dissipation method to keep the continuous temperature below 80°C.
High acceleration
Three-axis linkage with high acceleration, the acceleration can reach 18G, and it operates stably.
| Technical indicators | parameter | ||
| stroke(mm) | X:6 | Y: 165 | Z:30 |
| load | 3kg | ||
| repetition precision(um ) | X:±2 | Y:±2 | Z：±3 |
| acceleration(G) | 0.2 | 3 | 1.5 |
| setting time(ms) | 50 | 60 | 45 |
Semiconductor industry - Double - sided die bonding inspection
High Precision
XYZθ combination
Repeatability accuracy: ±0.5μm
Positioning accuracy: ±1μm
Repeatability accuracy: ±0.5μm
Positioning accuracy: ±1μm
Linear Error
The combined plane height of X, Y, and θ is within 10μm.
High Acceleration
Three - axis simultaneous high acceleration
The acceleration reaches 4G for stable operation
The acceleration reaches 4G for stable operation
| Technical indicators | parameter | ||||
| stroke(mm) | X:6 | Y: 165 | Z上:100 | Z下:100 | 0:360° |
| load(kg) | 15 | X+15 | 10 | 10 | / |
| repeatability accuracy(um) | ±0.5 | ±0.5 | ±0.55 | ±0.55 | 0.03° |
| positioning accuracy | ±1 | ±1 | ±1 | ±0.5 | 0.03° |
| motion time(ms) | 4.5mm/30 10mm/50 | 4.5mm/40 10mm/60 | / | / | / |
| setting time(ms) | 5~20 | 10~20 | / | / | / |
| motion stroke(mm) | single-step operation4.5 single-step operation10 | single-step operation4.5 single-step operation10 | minimum single - step movement0.0003 | minimum single - step movement0.0005 | 0:0.05° |
Marble cross Z-axis structure
Ultra - High Precision
XYZ combination
Repeatability accuracy: ±1.3μm
Positioning accuracy: ±1.9μm
Repeatability accuracy: ±1.3μm
Positioning accuracy: ±1.9μm
Linear Error
The combined plane height of X, Y, and Z is ≤ 3μm.
Stable and Reliable
High repeatability measurement accuracy
| Technical indicators | parameter | |||
| stroke(mm) | X:220 | Y: 420 | Z:40 | 备注 |
| load(kg) | 6 | X+6 | 3.4 | |
| repeatability accuracy(um) | ±0.8 | ±1.5 | ±0.3 | After compensation (5 passes of the interferometer) |
| positioning accuracy(um) | ±1.6 | ±1.9 | ±0.5 | After compensation (5 passes of the interferometer) |
| verticality(um) | X/Y:5 | / | ||
| flatness(um) | ≤3(50mm*50mm) | ≤3(50mm*50mm) | ≤3(50mm*50mm) | |
| Z-phase jitter(um) | ≤3.8 | ≤2.1 | ≤5 | |
| speed(m/s) | 0.5 | 0.5 | 0.1 | |
| acceleration(g) | 0.5 | 0.5 | 0.5 | |
| pause time(s) | 0.1 | 0.1 | 0.1 | |